MARSHAL TECH designs full vacuum systems using leading edge pumping systems and gate valves from world renowned suppliers such as Leybold, Edwards, VAT, GNB, and others. Every system is selected for its performance, reliability and serviceability.
Roughing Pump skids are configured to meet customer requirements to achieve cross-over vacuum levels and pump-down time. Systems can be configured as a turnkey "package" drop shipped to the customer site, or configured as separated components installed on site by XL technicians. Customer performance requirements and, more often, physical space requirements will dictate the chosen method.
High Vacuum Pumping systems achieving the final pressure of 1x10-8 torr after crossover from rough pumping. The high vacuum pumping system is primarily comprised of Cryo Pumps, supplemented with Turbo molecular Pumps and liquid nitrogen cooled cryogenic water vapor pumps.
Cryo Pumps take over from the roughing pumps to achieve the pump down requirement of 1x10-6 Torr by trapping the remaining gases and vapors by condensing them on cold surfaces. The cryo pumps use liquid nitrogen to cool the 80K surfaces and a helium refrigerator to cool the 20K surfaces (the working cold surfaces). They are isolated from the vacuum chamber by remotely operated stainless steel high vacuum gate valves that seal in both directions and allow any cryo pump to be regenerated with the chamber at high vacuum or to be cooled down while the chamber is being evacuated with the roughing skids. |
